PRODUCTS: Motorized XY Stages

Specification

Part #	Stage Travel	Resolution	Repeatability	Accuracy
Open Frame Stages for Upright Microscopes

H101	108 x 73 mm (4 x 3 inches)	0.1 µm	±1 µm	±3 µm

H138	230 x 71 mm (9 x 3 inches)	0.1 µm	±3µm	±10µm

H105	153 x 153 mm (6 x 6 inches)	0.1 µm (0.5 µm with linear scales)	±2 µm (±0.3 µm with linear scales)	±8 µm (±1 µm with linear scales)

H116	256 x 215 mm (10 x 8.5 inches)	0.1 µm (0.5 µm with linear scales)	±3 µm (±0.3 µm with linear scales)	±10µm (±1 µm with linear scales)

H124	300 x 100mm (12 x 4 inches)	0.1 µm	±3µm	±10µm

H112	300 x 300 mm (12 x 12 inches)	0.1 µm (0.5 µm with linear scales)	±5µm (±0.3 µm with linear scales)	±20µm (±1 µm with linear scales)


Solid Frame Stages for Hardness Testers and Upright Microscopes

Part #	Stage Travel	Resolution	Repeatability	Accuracy

HT5050	50 x 50 mm (2 x 2 inches)	0.1 µm	±1 µm	±3 µm

HT1010	100 x 100 mm (3.9 x 3.9 inches)	0.1 µm	±1 µm	±5µm

HT1111	108 x 108 mm (4.3 x 4.3 inches)	0.1 µm	±1 µm	±5µm

HT1566	150 x 66 mm (6 x 2.6 inches)	0.1 µm	±1 µm	±5µm


Stages for Inverted Microscopes

Part #	Stage Travel	Resolution	Repeatability	Accuracy

H107	108 x 69 mm (4 x 3 inches)	0.1 µm	±1 µm	±3 µm


X-Theta Stages

Part #	Stage Travel	Resolution	Repeatability	Accuracy

H101XTH	108 mm in X, 360° in Theta	1 µm in X, 0.01° in Theta	±1 µm in X, better than ±0.20° in Theta	±3 µm in X

H138XTH	230 mm in X, 360° in Theta	1 µm in X, 0.01° in Theta	±3µm in X, better than ±0.20° in Theta	±5µm in X